R和统计在半导体界的应用
中芯国际 -良率管理系统 2009-122009-12-12
Applied R and Statistics for Semiconductor Semiconductor introduction R/Statistics applications
Some recent cases Patent: Product Bit Analysis Patent: WAT Classification Analysis
Thank you 谢谢 Q&A
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基本资料 林光启 学历: 美国Texas A&M University 统计硕士, University of Southern California MBA 工作经验: Stata Corp, 客服工程师 PDF Solutions, 研发工程师 中芯国际, 良率管理部门主管
Integrated Circuit (IC) Manufacturing
Films Dep
ASET-F5
2. IC Manufacturing
Hitachi
5XXX
2401
Etcher
8XXX
Films
Stepper / Track
CD SEM
Overlay
Macro Metal 1
Etch
CD SEM
Vcc Bit Line Q3 T1 Q1 Q2 Q 4 T2 Bit Line
P+ N-Well P+ N+ P-Well N+
3. Fabricated Wafers
Word Line Vss
Word Line
1. IC Design
Fab Yield Management System Structure
Client Client
Client
Client
Index Server
YMS DB YMS DB
WIP & other data
WAT DB
WAT DB
MES Database
Server
Server

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